Ion-solid interactions for materials modification and processing

Ion-solid interactions for materials modification and processing
Dayush Ila, David B. Poker, Lloyd R. Harriott, Yang-Tse Cheng, Thomas W. Sigmon
Details
- OL Work ID
- OL19448475W
Subjects
Ion bombardmentIon implantationSemiconductorsIndustrial applicationsSolidsMaterialsCongressesEffect of radiation onMaterials, research