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Simulation calculations of physical sputtering and reflection coefficient of plasma-irradiated carbon surfaces

Simulation calculations of physical sputtering and reflection coefficient of plasma-irradiated carbon surfaces

Takaichi Kawamura, T. Ono, Yasunori Yamamura

Details

OL Work ID
OL44288649W

Subjects

Sputtering (Physics)Mathematical modelsReflectanceCarbonSurfaces

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