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MEMS and Nanotechnology, Volume 5MEMS and Nanotechnology, Volume 5

MEMS and Nanotechnology, Volume 5

Gordon Shaw III, Cosme Furlong, LaVern Starman, Barton C. Prorok

Details

OL Work ID
OL22449829W

Subjects

Microelectromechanical systemsMaterials, mechanical propertiesNanotechnology

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