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Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and Helium (4He+) ion impact from monatomic solids at normal incidence

Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and Helium (4He+) ion impact from monatomic solids at normal incidence

H. Tawara, Kazuho Sakaoka, Yasunori Yamamura

Details

OL Work ID
OL44372381W

Subjects

Sputtering (Physics)

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