S
S. P. Murarka
9 works on record
Works

Advanced metallizations in microelectronics

Advanced interconnects and contact materials and processes for future integrated circuits

Low-dielectric constant materials-- synthesis and applications in microelectronics

Interface Control of Electrical, Chemical, and Mechanical Properties Vol. 318

Microelectronics technology and process integration

Electronic materials

Metallization

Silicides for VLSI applications
Interlayer dielectrics for semiconductor technologies
Interlayer dielectrics for semiconductor technologies