D
Daniel J. C. Herr
7 works on record
Works

Metrology, inspection, and process control for microlithography XVI

Metrology, inspection, and process control for microlithography XVII

Nanoscience and Nanoengineering
Alternative lithographic technologies II
Alternative lithographic technologies II
Alternative lithographic technologies III
Alternative lithographic technologies III
Nanoelectronics
Nanoelectronics
Directed Self-Assembly for Nanopatterning
Directed Self-Assembly for Nanopatterning